1. Anti-seismic foundation structure Republic of China 183864
2. Method of kinetic energy absorption of high stiffness anti-seismic foundation Republic of China I240783
3. Vibration monitoring device for micro vibration foundation Republic of China 202489
4. Stiffness linkage structure for semiconductor process equipment Republic of China 216566
5. High stiffness anti-vibration foundation devices for semiconductor Republic of China M244332
6. High damping and vibration absorption foundation structure Republic of China M343036
7. Anti-vibration platform for semiconductor equipment United States 097, 146B2
8. Stiffness linkage structure for semiconductor process equipment People Republic of China ZL03245523.2
9. Micro vibration monitoring system for semiconductor process equipment People Republic of China ZL03101986.2
10. High damping and vibration absorption foundation structure People Republic of China ZL03101986.2 patent pending
11. Inspection platform structure for particle detection device Republic of China M343036 patent pending
 
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